rutherford backscattering spectroscopyの例文
- In Rutherford backscattering spectroscopy the correction due to electron screening modifies the Coulomb repulsion between the incident ion and the target nucleus at large distances.
- Special techniques are thus required to measure the positions of the surface atoms, and these generally fall into two categories : diffraction-based methods adapted for surface science, such as low-energy electron diffraction ( LEED ) or Rutherford backscattering spectroscopy, and atomic-scale probe techniques such as scanning tunneling microscopy ( STM ) or atomic force microscopy.
- This type of quality control occurs during the ALD process rather than assessing the films afterwards as in TEM imaging, or XRR . Additionally, Rutherford Backscattering Spectroscopy ( RBS ), X-Ray Photoelectron Spectroscopy ( XPS ), Auger Electron Spectroscopy ( AES ), and four-point probe ( FPP ) are some other techniques that can be used to provide quality control information with regards to thin films deposited by ALD.
